Concepedia

Highly Controllable Etching of Epitaxial GaAs Layers by the Pulse Etching Method

A. Grüb, K. Fricke, H.L. Hartnagel

Journal of The Electrochemical Society · 1991 · 21 citations · 0 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEtching ProcessesSemiconductor Device MaterialsSemiconductor HeterostructuresSemiconductor PhysicsSemiconductor Thin FilmsThin Film EtchingDeep EtchingEpitaxial OverlayersEtch MechanismsEtch Profile ControlEtchingSelective Etching