Low jitter and temperature stable MEMS oscillators

Abstract

This paper will provide an update of SiTime's TCXO technology and benchmark 4G & GPS specifications to show that SiTime's MEMS oscillators are capable of meeting these challenging specifications. This MEMS-based TCXO is able to achieve the following which was considered possible only with quartz oscillators: phase noise of -145dBc/Hz @ 10kHz offset and 19.2MHz carrier, frequency stability of 0.2 ppm over industrial temperature range (-40 to 85°C), Allan deviation of 3e-10 using 1 sec averaging time, and random phase jitter of 0.5ps RMS integrated from 12kHz to 20MHz.