Polymer microstructure generated by laser stereo-lithography and its transfer to silicon substrate using reactive ion etching - Concepedia

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Polymer microstructure generated by laser stereo-lithography and its transfer to silicon substrate using reactive ion etching

13

Citations

8

References

2007

Year

Yoshiaki Kanamori, Junya Sato, Takeshi Shimano, Shigeo Nakamura, Kazuhiro Hane

Microsystem Technologies

Materials ScienceEngineeringBeam LithographyPolymer MicrostructureMicrofabricationPolymer ScienceApplied PhysicsFabrication TechniqueMicro-optical ComponentLaser Stereo-lithographyMicroelectronicsPlasma Etching3D PrintingReactive IonNanolithography Method

References

	Year	Citations

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