Swing arm optical CMM for aspherics

P. P. Su, Chang Jin Oh, Robert E. Parks, James H. Burge

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 33 citations · 3 references

Concepts

Abstract

A profilometer for <i>in situ</i> measurement of the topography of aspheric mirrors called the Swing arm Optical CMM (SOC) was built, and has been used for measuring the figure of 1.4 m convex aspheric mirrors with a performance rivaling full aperture interferometric tests. Errors in the SOC that have odd symmetry are self-calibrated due to the test geometry. Even errors are calibrated against a full aperture interferometric test.

References

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