Concepedia

Interferometric Surface Profilometry

Interferometric Surface Profilometry is a non-contact optical measurement technique that uses the interference of coherent light waves to determine surface topography with nanometer-level precision by analyzing the phase differences between reference and sample beams.

233

Publications

12.7K

Citations

659

Authors

216

Institutions

Publications per year

2017–2026

37

Parents

Publications

233

Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry

Mitsuo Takeda, Hideki Ina, Seiji Kobayashi · Journal of the Optical Society of America · 1982 · 4.2K citations

, , +15

Thin film studies using multiple-beam interferometry

J.N Israelachvili · Journal of Colloid and Interface Science · 1973 · 752 citations

, , +12

Optical Interferometry of Surfaces

Glen M. Robinson, David Perry, Richard W. Peterson · Scientific American · 1991 · 361 citations

, , +11

Improved vertical-scanning interferometry

Akiko Harasaki, Joanna Schmit, James C. Wyant · Applied Optics · 2000 · 275 citations · Full text

, , +14

Robust dynamic 3-D measurements with motion-compensated phase-shifting profilometry

Shijie Feng, Chao Zuo, Tianyang Tao et al. · Optics and Lasers in Engineering · 2017 · 196 citations

, , +14

1–5 of 233

Authors

659

  1. YK
    Yangjin Kim

    The University of Tokyo, Japan

    6 publications · 105 citations

    6

    h-index

  2. KH
    Kenichi Hibino

    National Institute of Advanced Industrial Science and Technology, Japan

    4 publications · 81 citations

    4

    h-index

  3. ST
    S. Tolansky

    Royal Holloway University of London, United Kingdom

    4 publications · 54 citations

    4

    h-index

  4. KV
    Krishnan Venkatakrishnan

    Toronto Metropolitan University, Canada

    4 publications · 99 citations

    4

    h-index

  5. NS
    Naohiko Sugita

    The University of Tokyo, Japan

    4 publications · 69 citations

    4

    h-index

1–5 of 659

Institutions

216

  1. University of Arizona

    Tucson, United States

    7 h-index

    16 publications

    1.3K citations

  2. Nanyang Technological University

    Singapore, Singapore

    5 h-index

    16 publications

    493 citations

  3. Pusan National University

    Busan, South Korea

    5 h-index

    16 publications

    276 citations

  4. Chinese Academy of Sciences

    Beijing, China

    5 h-index

    22 publications

    720 citations

  5. The University of Tokyo

    Tokyo, Japan

    5 h-index

    12 publications

    238 citations

  6. Korea Advanced Institute of Science and Technology

    Daejeon, South Korea

    5 h-index

    20 publications

    453 citations

  7. Loughborough University

    Loughborough, United Kingdom

    4 h-index

    6 publications

    120 citations

  8. Tianjin University

    Tianjin, China

    4 h-index

    11 publications

    413 citations

1–8 of 216

Venues

  1. Optics and Lasers in Engineering

    35 publications · 1.2K citations

    21

    h-index

  2. Applied Optics

    24 publications · 1.2K citations

    17

    h-index

  3. 12

    h-index

  4. Optics Express

    10 publications · 321 citations

    10

    h-index

  5. Optics Communications

    10 publications · 207 citations

    10

    h-index

1–5