Continuous YBa/sub 2/Cu/sub 3/O/sub 7-δ/ film deposition by optically controlled reactive thermal co-evaporation

Abstract

We built a thermal co-evaporation system to deposit YBCO films on large areas in a continuous process which requires some basic modifications to the established standard co-evaporation setup. An optical rate control system based on atomic absorption spectroscopy has been developed to measure the individual metal fluxes, in addition the metal sources can be reloaded in-situ for long times. The performance of these new components is discussed and results of first YBCO films grown on small samples are shown.