IEEE Transactions on Applied Superconductivity · 1997 · 108 citations · 6 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsHeat TransferThin FilmsSuperconducting Thin FilmsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsBuffer LayersCritical Current DensityHigh-temperature Superconducting FilmsPolycrystalline MaterialsSurface ResistanceThermal EvaporationThin Oxide FilmsYttrium Barium Copper Oxide Films
High quality YBa/sub 2/Cu/sub 3/O/sub 7/ thin films can be grown by reactive thermal co-evaporation. Combined with a rotating disk heater this method allows to fabricate even double sided homogeneous films on substrate areas up to 9" diameter. A scanning inductive j/sub c/ probe is used to monitor the homogeneity of critical current densities of typically >2 MA/cm/sup 2/. Surface resistance values are found to be below 500 /spl mu//spl Omega/ at 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates j/sub c/ values of 1.3 MA/cm/sup 2/ are achieved as well. The properties of Nd/sub 1-x/Ba/sub 2+x/Cu/sub 3/O/sub 7/ films grown with the same system are presented and evaluated.
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Properties of YBa2Cu3O7−δ thick films on flexible buffered metallic substrates
X. D. Wu, S. R. Foltyn, P. N. Arendt et al. · Applied Physics Letters · 1995 · 341 citations
Homogeneous high quality YBa2Cu3O7 films on 3″ and 4″ substrates
P. Berberich, B. Utz, W. Prusseit et al. · Physica C Superconductivity · 1994 · 106 citations
Natural Sciences, Materials Engineering, Materials Science +12