Applied Surface Science · 1995 · 48 citations · 26 references
Materials EngineeringMaterials ScienceSurface CharacterizationEngineeringUniform OverlayersSurface AnalysisSurface ScienceApplied PhysicsAngle-dependent XpsThickness DeterminationElectronic PackagingMicroelectronicsSurface ProcessingDepth-graded Multilayer Coating
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