Concepedia

Publication | Closed Access

Overview Of Process Integration Issues For Low K Dielectrics

DOI

25

Citations

1

References

1998

Year

Robert Havemann, Manoj Kumar Jain, R. S. List, A.R.K. Ralston, W-Y. Shih, C. Jin, Meng‐Chou Chang, E. M. Zielinski, Girish Dixit, Aishwarya Singh,
MRS Proceedings

References

YearCitations

Page 1