Surface Review and Letters · 1999 · 62 citations · 52 references
Natural SciencesMaterials EngineeringMaterials ScienceOpticsSpectroscopySurface ScienceElectron MicroscopyOptical SpectroscopyPhotoelectron SpectroscopyX-ray OpticsX-ray Photoelectron SpectroscopyX-ray SpectroscopyHigh-resolution X-ray ImagingLateral ResolutionLateral Resolution ImprovementMicroscopyScanning Electron MicroscopyScanning Electron Microscopy Surface AnalysisSoft X-ray SpectroscopySynchrotron-based X-ray Photoelectron Spectroscopy
X-ray photoelectron spectroscopy has become a true microscopic technique at third generation soft X-ray synchrotron sources, finding applications in many domains of academic and applied research. This paper describes the present status of scanning photoemission microscopy, where by using photon optics the photon beam can be focused to micron or submicron dimensions and imaging or spectroscopy can be performed. It discusses different photon focusing optical elements and describes the major components of the constructed scanning microscopes. The applications of imaging and spectroscopy with high lateral resolution in surface science are illustrated, and some recent results obtained in different laboratories are briefly reviewed.
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