Ion probe microanalysis

Abstract

Ion probe microanalysis has evolved as a new technique for characterization of solid samples with high spatial resolution. It complements electron probe microanalysis for elemental analysis in the range of low concentrations and in its applicability includes in-depth concentration profiling, isotopic analysis for the study of transport phenomena with stable tracer isotopes and for radiometric in-situ age dating of mineral samples, and the identification of compounds by their fingerprint spectra. A review of the evolution of presently available instrumentation is given, aspects of qualitative and quantitive analysis and of the sensitivity in conjunction with sample consumption are discussed, examples of applications are listed, and trends in further development are briefly touched on.