Publication | Closed Access
A New Defect Etch for Polycrystalline Silicon
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1984
Year
Materials EngineeringSilicium PolycristallinEngineeringMicrofabricationApplied PhysicsPolycrystalline SiliconAnalytical ChemistryPlasma EtchingElectronic PackagingSilicon On InsulatorDefauts DansBiomolecular EngineeringChromatographySilicon DebuggingPour La Detection
Presentation d'une methode d'attaque isotrope pour la detection de defauts dans le silicium polycristallin. Application a un ruban de silicium polycristallin prepare par le procede RTR de Motorola