Applied Physics A · 2011 · 20 citations · 17 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistryThin FilmsEtching ProcessesSemiconductor Device MaterialsThin Film EtchingThin-film DepositionThin-film PatterningWide-bandgap SemiconductorsDevice FabricationDry EtchingEtch ChemistryEtch MechanismsSelective EtchingWet Chemical EtchingWet Etching
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Understanding the phase-change mechanism of rewritable optical media
Alexander V. Kolobov, Paul Fons, Anatoly I. Frenkel et al. · Nature Materials · 2004 · 1.3K citations