Dissociative electron attachment to Pt(PF₃)₄—a precursor for Focused Electron Beam Induced Processing (FEBIP)

Abstract

Experimental absolute cross sections for dissociative electron attachment (DEA) to Pt(PF(3))(4) are presented. Fragment anions resulting from the loss of one, two, three and four PF(3) ligands as well as the Pt(PF(3))F(-) and the F(-) ions were observed. The parent anion Pt(PF(3)) is too short-lived to be detected. The dominant process is loss of one ligand, with a very large cross section of 20 000 pm(2); the other processes are about 200× weaker, with cross sections around 100 pm(2), the naked Pt(-) anion is formed with a cross section of only 1.8 pm(2). The resonances responsible for the DEA bands were assigned based on comparison with electron energy-loss spectra and spectra of vibrational excitation by electron impact. Bands around 0.5 eV and 2 eV were assigned to shape resonances with single occupation of virtual orbitals. A DEA band at 5.9 eV was assigned to a core-excited resonance corresponding to an electron very weakly bound to the lowest excited state. An F(-) band at 12.1 eV is assigned to a core excited resonance with a vacancy in an orbital corresponding to the 2nd ionization energy of the PF(3) ligand. Implications of these findings for FEBIP are discussed.