Journal of Electronic Materials · 2010 · 41 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials ChemistryThin FilmsChemical Vapor DepositionMetal Oxide NanomaterialsOxide SemiconductorsPhysical Vapor DepositionSpray DepositionDeposition TechniquesElectron ScatteringElectron-phonon ScatteringFilm Growth MechanismsPyrolysisSpray PyrolysisThin Oxide Films
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