Applied Optics · 1991 · 78 citations · 21 references
EngineeringElectrical EngineeringOpticsOptoelectronicsPhotonicsInterferometryLaser DiodesLaser OpticsOptical InstrumentationOptical MetrologyOptical SensingInterferometric MeasurementInterferometric MetrologyLaser Metrology SystemsLaser StabilityOptical InterferometersOptical InterferometryPhase MeasurementServo Control Systems
The phase ambiguity in conventional interferometers can be removed by using two laser diodes of different optical frequencies to generate a synthetic wavelength. However, the stability requirements for a two-color interferometric laser gauge that must provide unambiguous determination of the optical fringe order over a large distance can be severe. We derive upper limits on the optical wavelength uncertainty and express them as a function of optical path difference between the object and reference beams, phase measurement errors, and the synthetic wavelength. A simple stabilization arrangement is proposed, involving simultaneous servo control of both lasers with a single Fabry-Perot étalon. The experimental implementation of the proposed system demonstrates its effectiveness for long-term (16-h) stabilized two-color interferometry over a distance of 250 mm, with a 15-mm synthetic wavelength and a repeatability of 40 nm. For periods of < 1000 s, the repeatability was 8 nm.
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Digital wave-front measuring interferometry: some systematic error sources
Johannes Schwider, R. Burow, K.-E. Elßner et al. · Applied Optics · 1983 · 712 citations
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Yeou-Yen Cheng, James C. Wyant · Applied Optics · 1984 · 432 citations
Engineering, Physics, Metrology +16
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Katherine Creath · Applied Optics · 1987 · 260 citations
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Two-wavelength laser interferometry using superheterodyne detection
R. Dändliker, R. Thalmann, D. Prongúê · Optics Letters · 1988 · 243 citations · Full text