Electroplating Ni micro-cantilevers for low contact-force IC probing - Concepedia

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Electroplating Ni micro-cantilevers for low contact-force IC probing

53

Citations

6

References

2002

Year

Kenichi Kataoka, Shingo KAWAMURA, Toshihiro Itoh, K. Ishikawa, Hideo HONMA, Tadatomo Suga

Sensors and Actuators A Physical

Electrical EngineeringEngineeringMicrofabricationApplied PhysicsNano Electro Mechanical SystemElectronic PackagingInstrumentationMicroelectronicsMicro-electromechanical SystemNi Micro-cantilevers

References

	Year	Citations

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