Dual-wavelength Digital Holography Microscope for BGA Measurement Using Partial Coherence Sources

Abstract

Dual-wavelength holography has a better axial range than single-wavelength holography, allowing unambiguous phase imaging. Partial coherence sources reduce coherent noise, resulting in improved reconstructed images. We measured a ball-grid array using dual-wavelength holography with partial coherence sources. This holography method is useful for measurement samples that exhibit coherence noise and have a step height larger than the single wavelength used in holography.