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Optical and Electrical Properties of Undoped Microcrystalline Silicon Deposited by the VHF-GD with Different Dilutions of Silane in Hydrogen

DOIFull Paper Access

25

Citations

7

References

1996

Year

N. Beck, P. Orres, J. Fric, Z. Remeš, A. Poruba, A. Fejfar, N. Wyrsch, M. Vaněček, J. Kočka, A. Shah
MRS Proceedings

References

YearCitations

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