Publication | Closed Access
Uniform, Axial‐Orientation Alignment of One‐Dimensional Single‐Crystal Silicon Nanostructure Arrays
464
Citations
28
References
2005
Year
Selective EtchingEngineeringSilicon On InsulatorNanoelectronicsAxial‐orientation AlignmentNanolithography MethodMaterials ScienceNanotechnologySemiconductor Device FabricationMicroelectronicsPlasma EtchingSilver-nanoparticle NetworkFacile Etching TechniqueNanomaterialsMicrofabricationSelf-assemblyApplied PhysicsNanofabricationNanostructures
Neatly scratching the surface: A facile etching technique assisted by a silver-nanoparticle network to produce large-area 1D silicon nanostructure arrays with desired orientation and doping characteristics is demonstrated (see picture). A mechanism for the highly selective etching is proposed on the basis of experimental evidence.
| Year | Citations | |
|---|---|---|
Page 1
Page 1