A magnetic levitation transport path

Abstract

A magnetic levitation transport path particularly suitable for moving objects in clean environments, such as for the transportation of wafers in clean rooms, is described. The present transport path is a demonstration system and is not designed for a specific application. It demonstrates the feasibility of applying a microcomputer-controlled magnetic field to generate linear motion of a carrier with permanent magnets. A simple path geometry is adopted for analysis, and it shows that the control task involved can be very straightforward. Completely free-floating levitation of the carrier has not yet been achieved, but reducing contact friction has been studied. Areas of discussion include controller design, carrier velocity, motion smoothness, and load-carrying ability for different versions of transport paths.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">&gt;</ETX>