Simulation and Optimal Design for RF MEMS Cantilevered Beam Switch

Abstract

The mechanical and electric characteristics of RF switch significantly depend on its structural parameters, so itpsilas important to design and optimize the structure of the RF MEMS switch. This article proposes a kind of RF MEMS switch structure with special cantilevered beam section. The modal analysis is implemented by the finite element software ANSYS. And the structure parameters of the cantilevered beam are optimized with the methods of orthogonal experiment, BP neural network and genetic algorithm (GA). The validity simulation of the optimization is verified by the analyses of the random vibration and harmonic response. The results show that RF MEMS switch with optimized cantilevered beam structure has lower actuation voltage, higher dynamic stiffness.