Micromachined X-ray collector for space astronomy

Micropore x-ray optics using anisotropic wet etching of (110) silicon wafers

Yuichiro Ezoe, Masaki Koshiishi, Makoto Mita et al. · Applied Optics · 2006 · 45 citations

Engineering, Materials Engineering, Materials Science +17

Uniform groove-depths in (110) Si anisotropic etching by ultrasonic waves and application to accelerometer fabrication

K. Ohwada, Y. Negoro, Y. Konaka et al. · Sensors and Actuators A Physical · 1995 · 27 citations

Engineering, Materials Engineering, Mechanical Engineering +15