Publication | Open Access
Chemical vapour deposition of Ir-based coatings: chemistry, processes and applications
48
Citations
76
References
2015
Year
EngineeringCrystal Growth TechnologyChemistryChemical DepositionChemical EngineeringThin Film ProcessingProtective CoatingMaterials ScienceMaterials EngineeringThermal Spray CoatingCrystallographyMaterial AnalysisSurface ScienceApplied PhysicsNumerical CharacterizationProtective CoatingsThin FilmsChemical VapourChemical Vapor Deposition
Iridium-based film precursor chemistry, nucleation and growth at CVD/ALD are reviewed with numerical characterization of the growth features in 3D objects.
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