Modeling of an omni-directional high precision friction drive positioning stage

Abstract

A friction drive high precision positioning stage is proposed. While conventional three degrees of freedom stage systems usually utilize three different stages, the proposed system has only one movable stage for the three degrees of freedom. Therefore, this design has a simple structure and low cost. Furthermore, the stage can move omni-directionally with three degrees of freedom, namely, two linear and one rotational motions. The stage uses three special actuation systems, each of which is designed so as to generate a directional elliptical motion which allows the stage to move in a desired direction. The kinematic and dynamic models of the proposed system are presented. The bond graph modeling representation is used to offer a clear understanding of the general friction drive stage dynamic behavior. Simulation results demonstrate the feasibility of the design concept.