Publication | Closed Access
Nano-patterning using an embedded particle monolayer as an etch mask
30
Citations
11
References
2006
Year
Materials ScienceEngineeringBeam LithographyPhysicsMicrofabricationNanotechnologyNanomaterialsSurface ScienceApplied PhysicsPattern TransferNanolithographyNanofabricationPlasma EtchingEmbedded Particle MonolayerNanolithography Method
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