2003 · 15 citations · 1 references
EngineeringElectrical EngineeringManufacturing EngineeringMaterials ProcessingMicrofabricationMicrowave EngineeringEtching ProcessesMems FabricationMicrowave Integrated CircuitsMicrowave OscillatorsChemical EtchingEtchingMechanical PolishingPolishingReactive Ion EtchingSurface Etching
In addition to the conventional methods of chemical etching and mechanical polishing, reactive ion etching (RIE) is proposed as a major production method of high frequency quartz oscillators. We have found that RIE, with the selection of a condition, is useful in the production of quartz oscillators, and that mechanical polishing is effective for the improvement of the characteristic.
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UHF AT-cut crystal resonators operating in the fundamental mode
Osamu Ishii, Hirokazu Iwata, M. Sugano et al. · 2002 · 16 citations