Publication | Closed Access

Comparative study of the oxidation of thin porous silicon layers studied by reflectometry, spectroscopic ellipsometry and secondary ion mass spectroscopy

Surface CharacterizationChemical EngineeringEngineeringSurface AnalysisSurface ScienceApplied PhysicsSpectroscopic EllipsometrySiliceneSemiconductor Device FabricationChemistrySilicon On InsulatorComparative Study