Concepedia

Publication | Closed Access

Improved manufacturability of ZrO2 MIM capacitors by process stabilizing HfO2 addition

DOI

44

Citations

9

References

2009

Year

Johannes Müller, T. S. Böscke, U. Schröder, M. Reinicke, L. Oberbeck, Dayu Zhou, Wenke Weinreich, P. Kücher, M. Lemberger, L. Frey
Microelectronic Engineering

References

YearCitations

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