Electrical Behavior and Technology Optimization of Si/SiGeC HBTs on Thin-Film SOI

Abstract

<para xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"> A growing interest has been focused on silicon on insulator (SOI) technologies over the past years. Yet, few studies were carried out regarding the integration of vertical SiGe heterojunction bipolar transistors (HBTs) using such substrates. This paper deals both with the integration of a SiGeC HBT on thin-film CMOS-compatible SOI, and a comprehensive study of its electrical behavior based on physical simulation and electrical characterization. Various aspects of the optimization of device performances are described, considering process or layout improvements. </para>