Kinetic roughening of vicinal Si(001) - Concepedia

Concepedia

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Kinetic roughening of vicinal Si(001)

DOI Full Paper Access

16

Citations

27

References

1994

Year

P.E. Hegeman, Harold J. W. Zandvliet, Gerhardus A.M. Kip, A. van Silfhout

Surface Science

Materials EngineeringMaterials ScienceEngineeringMicrofabricationApplied PhysicsSiliceneSemiconductor Device FabricationSilicon On InsulatorMicroelectronicsVicinal SiMicrostructure

References

	Year	Citations

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