Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-k SiO2 xerogel films - Concepedia

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Comparison of techniques to characterise the density, porosity and elastic modulus of porous low-k SiO2 xerogel films

71

Citations

5

References

2002

Year

Christopher P. Murray, C.M. Flannery, I. Streiter, Stefan E. Schulz, Mikhaı̈l R. Baklanov, K. P. Mogilnikov, Cameliu Himcinschi, M. Friedrich, Dietrich R. T. Zahn

Microelectronic Engineering

Materials EngineeringMaterials ScienceElastic ModulusPore StructureEngineeringNanoporous MaterialPorous MembraneApplied PhysicsPorositySoft MatterSol-gel Synthesis

References

	Year	Citations

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