IEEE Photonics Technology Letters · 2008 · 59 citations · 8 references
PhotonicsOptical MaterialsEngineeringBeam LithographyWafer Scale ProcessingMicrofabricationOptical PropertiesElectron-beam LithographyHcg Critical DimensionApplied PhysicsLarge Fabrication ToleranceSurface-emitting LasersPhotonic DeviceOptoelectronicsHcg-vcsel ShiftsNanophotonicsElectro-optics DeviceDepth-graded Multilayer Coating
We report the experimental demonstration of a large fabrication tolerance for a single-layer, highly reflective high-index-contrast subwavelength grating (HCG) mirror. HCG vertical-cavity surface-emitting lasers (VCSELs) are demonstrated with plusmn20% variation in the HCG critical dimension. Emission wavelength of the HCG-VCSEL shifts only 2 nm with 40% change in grating spacing and 8% change in grating period.
8
Nanoimprint lithography: challenges and prospects
S. Zankovych, Thomas Hoffmann, J. Seekamp et al. · Nanotechnology · 2001 · 212 citations
Engineering, Mechanical Engineering, Biomedical Engineering +16