International Journal of Precision Engineering and Manufacturing · 2014 · 70 citations · 15 references
EngineeringManufacturing EngineeringMaterials ScienceManufacturing ProcessesProduction EngineeringSurface EngineeringMachiningMetal FabricationMicrostructure ControlSubstrate PreparationSurface RoughnessWafer BondingDiamond GrindingWafer DicingWafer Materials
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