Characteristics in SiC-CMP using MnO<sub>2</sub> slurry with Strong Oxidant under Different Atmospheric Conditions - Concepedia

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Characteristics in SiC-CMP using MnO<sub>2</sub> slurry with Strong Oxidant under Different Atmospheric Conditions

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Citations

2

References

2013

Year

Syuhei KUROKAWA, Toshiro Doi, Osamu Ohnishi, Tsutomu Yamazaki, Zhe Tan, Tao Yin

MRS Proceedings

Materials EngineeringMaterials ScienceChemical EngineeringEngineeringOxidation ResistanceCeramics MaterialsStructural CeramicCeramic TechnologyStrong OxidantDifferent Atmospheric ConditionsCarbide

References

	Year	Citations

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