Prototype of a radiation hard resistive bolometer for ITER

Abstract

A schematic diagram of the prototype radiation hard resistive bolometer foil is shown in Fig. 1. An isolating layer of silicon nitride is grown on a 500 µm thick silicon wafer. This isolating layer of silicon nitride is sandwiched between a metal film layer that absorbs the radiation emitted from the plasma and a patterned meander track of metal. The temperature