Publication | Closed Access
Monolithic GaAs MESFET power sensor microsystem
33
Citations
1
References
1995
Year
Electrical EngineeringEnergy HarvestingEngineeringMicromachinesSensorsMicrofabricationPrecise Power MeasurementDesired ParametersSensor DesignBroad Frequency RangeInstrumentationMicroelectronicsMicro TechnologySensor TechnologyMicro-electromechanical System
The authors present the principle, technology and properties of a novel power sensor microsystem designed for very precise power measurement in a broad frequency range. Bulk micromachining technology on GaAs was implemented to obtain the desired parameters of the sensor.
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