Electronics Letters · 1995 · 33 citations · 1 references
EngineeringElectrical EngineeringMicroelectronicsMicrofabricationSensorsElectrical SensorsMems DesignMems FabricationRf MemsLow-power Sensor SystemsMicrofabricated SensorsMicromachined SensorsPower Measurement
The authors present the principle, technology and properties of a novel power sensor microsystem designed for very precise power measurement in a broad frequency range. Bulk micromachining technology on GaAs was implemented to obtain the desired parameters of the sensor.
1