Publication | Closed Access
Control issues for microelectromechanical systems
18
Citations
5
References
2006
Year
Electrical EngineeringControl IssuesEngineeringMicromachinesMicrofabricationMechanical SystemsMicroelectromechanical SystemsSystems EngineeringMems ControlElectronic-mechanical SystemMicroactuatorControl TechnologyMicroelectronicsControl SystemsMicro-electromechanical System
This paper highlights some microelectromechanical systems (MEMS) control issues and provides an overview of MEMS control.
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