Concepedia

Multi-$V_{T}$ UTBB FDSOI Device Architectures for Low-Power CMOS Circuit

Jean-Philippe Noël, Olivier Thomas, Marie-Anne Jaud, O. Weber, T. Poiroux, C. Fenouillet-Béranger, P. Rivallin, P. Scheiblin, François Andrieu, Maud Vinet,

IEEE Transactions on Electron Devices · 2011 · 183 citations · 24 references

DOI

Abstract

This paper analyzes the potential of fully depleted silicon-on-insulator (FDSOI) technology as a multiple threshold voltage V T platform for digital circuits compatible with bulk complementary metal-oxide-semiconductor (CMOS). Various technology options, such as gate materials, buried oxide thickness, back plane doping type, and back biasing, were investigated in order to achieve a technology platform that offers at least three distinct V T options (high- V T , standard- V T , and low- V T ). The multi- V T technology platform highlighted in this paper was developed with standard CMOS circuit design constraints in mind; its compatibility in terms of design and power management techniques, as well as its superior performance with regard to bulk CMOS, are described. Finally, it is shown that a multi- VT technology platform based on two gate materials offers additional advantages as a competitive solution. The proposed approach enables excellent channel electrostatic control and low VT variability of the FDSOI process. The viability of the proposed concept has been studied through technology computer-aided design simulations and demonstrated through experimental measurements on 30-nm gate length devices.