Study of laser induced ablation with focused ion beam/scanning electron microscope devices

M. Bussoli, D. Batani, Federico Canova, Marziale Milani, M. Trtica, B. Gaković, E. Krousky

Laser and Particle Beams · 2007 · 22 citations · 28 references

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Concepts

Abstract

We propose the use of Focused Ion Beam/Scanning Electron Microscope (FIB/SEM) devices for the analysis of ablation results. Ablated samples have been obtained by irradiating an Al planar target with an optically smoothed iodine laser working at 0.44 μm. The interpretation of FIB images shows the high potentiality of the technique.

References

28