Publication | Open Access
Defect analysis and excitons diffusion in undoped homoepitaxial diamond films after polishing and oxygen plasma etching
55
Citations
19
References
2009
Year
Materials ScienceExcitons DiffusionEngineeringOxygen PlasmaApplied PhysicsDefect AnalysisDefect FormationEpitaxial GrowthPlasma Etching
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