Development of high precision mechanical probes for coordinate measuring machines

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium

J. J. Wortman, Russell Evans · Journal of Applied Physics · 1965 · 1.3K citations

Natural Sciences, Materials Science, Physics +17

Geometric Error Measurement and Compensation of Machines

Stefano Sartori, Guoqing Zhang · CIRP Annals · 1995 · 288 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +12

Design for Precision: Current Status and Trends

P.H.J. Schellekens, Nick Rosielle, H. Vermeulen et al. · CIRP Annals · 1998 · 230 citations

Engineering, Design, Manufacturing Engineering +8

Design for a Compact High-Accuracy CMM

G.N. Peggs, Andrew Lewis, S. Oldfield · CIRP Annals · 1999 · 130 citations

Engineering, Electrical Engineering, Instrumentation +8