A high performance MEMS based digital-output gyroscope

Abstract

In this work, the architecture, and measurements results of an ultra-low noise closed-loop force feedback gyroscope, with superior bias instability, are presented. The MEMS is interfaced to a highly programmable capacitive interface ASIC, constructing a complete sensor module with a digital-output. Measurements results indicate the superior performance of the gyroscope, with a bias instability of 1°/hr, a noise floor of 1.3m/s/√Hz, and a full-scale range of ±300°/s, while consuming 25mA from a 5V supply.