A fourth-order /spl Sigma//spl Delta/ interface for micromachined inertial sensors

Abstract

This paper presents the design and implementation of a high-order /spl Sigma//spl Delta/ interface for micromachined inertial sensors, which employs an electronic filter in series with the mechanical sensor element to reject the excessive in-band quantization noise inherently present in state-of-the-art second-order solutions. A fourth-order prototype was fabricated in a standard 0.5-/spl mu/m CMOS process. The active circuit area measures 0.9 mm/sup 2/, and the interface consumes 13 mW from a 5-V supply and achieves resolution of 1/spl deg//s//spl radic/Hz with a gyroscope and 150/spl mu/g//spl radic/Hz with an accelerometer. Comparison between the measured and simulated behavior of the system shows that the contribution of the quantization error to the total noise is negligible.