In Vivo Biostability of CVD Silicon Oxide and Silicon Nitride Films - Concepedia

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In Vivo Biostability of CVD Silicon Oxide and Silicon Nitride Films

38

Citations

9

References

2005

Year

John M. Maloney, Sara Lipka, Samuel P. Baldwin

MRS Proceedings

Materials ScienceVivo BiostabilityEngineeringMicrofabricationNanotechnologySilicon On InsulatorSurface ScienceApplied PhysicsSemiconductor Device FabricationBiomedical EngineeringChemical Vapor DepositionCvd Silicon OxideThin Film ProcessingSilicon Nitride Films

References

	Year	Citations

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