Development of a low cost hybrid Si/PDMS multi-layered pneumatic microvalve

SOFT LITHOGRAPHY

Younan Xia, George M. Whitesides · Annual Review of Materials Science · 1998 · 4.6K citations

Engineering, Materials Engineering, Materials Science +16

Monolithic Microfabricated Valves and Pumps by Multilayer Soft Lithography

Marc Unger, Hou-Pu Chou, Todd Thorsen et al. · Science · 2000 · 4K citations

Engineering, Bioengineering, Biomedical Engineering +17

Microfluidic Large-Scale Integration

Todd Thorsen, Sebastian J. Maerkl, Stephen R. Quake · Science · 2002 · 2.2K citations · Full text

Engineering, Computer Engineering, Biomems +16

A pneumatically-actuated three-way microvalve fabricated with polydimethylsiloxane using the membrane transfer technique

Kazuo Hosokawa, Ryutaro Maeda · Journal of Micromechanics and Microengineering · 2000 · 197 citations

Engineering, Chemical Engineering, Materials Engineering +17

A gas chromatography system fabricated on a silicon wafer using integrated circuit technology

S.C. Terry · 1975 · 80 citations

Engineering, Chemical Engineering, Chemistry +16