MRS Proceedings · 1983 · 26 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsSolid State PhysicsEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor PhysicsSilicon MaterialsSilicon ChemistrySilicon EpitaxySilicon ImpuritiesSilicon Physics
13
Implanted noble gas atoms as diffusion markers in silicide formation
S.S. Lau, J. W. Mayer, Helmut Müller et al. · Thin Solid Films · 1975 · 266 citations
Natural Sciences, Materials Engineering, Materials Science +5