Concepedia

Coimplantation Effects on the Electrical Properties of Boron and Aluminium Acceptors in 4H-SiC

Hisayoshi Itoh, T. Troffer, Gerhard Pensl

Materials science forum · 1998 · 21 citations · 0 references

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Concepts

EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsIon ImplantationSemiconductor Device MaterialsSemiconductor InterfacesSemiconductor PhysicsBoron IncorporationElectrical PropertiesElectrical Properties AnalysisSilicon CarbideSilicon Carbide (Sic) MaterialsSilicon Carbide Ceramics