Highly (111)-oriented and conformal iridium films by liquid source metalorganic chemical vapor deposition

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The Physics of Ferroelectric Memories

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(Ba,Sr)TiO3 thin films for ultra large scale dynamic random access memory.

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Natural Sciences, Materials Engineering, Materials Science +15

Metalorganic Chemical Vapor Deposition of Complex Metal Oxide Thin Films by Liquid Source Chemical Vapor Deposition

Peter C. Van Buskirk, Steve Bilodeau, Jeffrey F. Roeder et al. · Japanese Journal of Applied Physics · 1996 · 63 citations

Natural Sciences, Materials Engineering, Materials Science +16