Concepedia

Avoiding the Curtaining Effect: Backside Milling by FIB INLO

Stephen Schwarz, B.W. Kempshall, Lucille A. Giannuzzi, M.R. McCartney

Microscopy and Microanalysis · 2003 · 22 citations · 1 references

Open access

Concepts

EngineeringAerospace EngineeringMaterials ScienceAerospace MaterialsMechanical Behavior Of MaterialsMicrofabricationAtomic Force MicroscopyMicrofabrication ProcessesPrecision Microfabrication

Abstract

Stephen M Schwarz, Brian W Kempshall, Lucille A Giannuzzi1, Molly R McCartney; Avoiding the Curtaining Effect: Backside Milling by FIB INLO, Microscopy and

References

1

Microelectronic failure analysis : desk reference

Thomas W. Lee, Seshu V. Pabbisetty · Medical Entomology and Zoology · 1993 · 84 citations

Engineering, Computer Engineering, Electrical Engineering +14